Exploring argon plasma effect on ferroelectric Hf0.5Zr0.5O2 thin film atomic layer deposition
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چکیده
منابع مشابه
Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
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ژورنال
عنوان ژورنال: Journal of Materials Research
سال: 2020
ISSN: 0884-2914,2044-5326
DOI: 10.1557/jmr.2020.270